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CMP aware shuttle mask floorplanning

Published: 18 January 2005 Publication History

Abstract

By putting different chips on the same mask, shuttle mask (or multiple project wafer) provides an economical solution for low volume designs and design prototypes to share the rising mask cost. A challenging floorplanning problem is to optimally pack these chips according to objectives and constraints related to cost and manufacturability. In this paper, we study the problem of CMP aware shuttle mask floorplanning, which is formulated as a rectangle packing problem with objectives of area and post-CMP topography variation minimization. We propose a 3-step procedure to solve the problem. First, we use the low-pass filter oxide CMP model to guide the simulated annealing search to minimize the topography variation. The result is then further improved by sliding each chip in its enclosing rectangle. Finally, we calculate the optimal amount of dummy feature needed with a linear programming method. Our experiment show excellent results on real industry data.

References

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Cited By

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  • (2011)Optimal wafer cutting in shuttle layout problemsJournal of Combinatorial Optimization10.1007/s10878-009-9284-z22:2(202-216)Online publication date: 1-Aug-2011
  • (2009)BoxRouter 2.0ACM Transactions on Design Automation of Electronic Systems10.1145/1497561.149757514:2(1-21)Online publication date: 7-Apr-2009
  • (2008)Chip placement in a reticle for multiple-project wafer fabricationACM Transactions on Design Automation of Electronic Systems10.1145/1297666.129768813:1(1-21)Online publication date: 6-Feb-2008

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cover image ACM Conferences
ASP-DAC '05: Proceedings of the 2005 Asia and South Pacific Design Automation Conference
January 2005
1495 pages
ISBN:0780387376
DOI:10.1145/1120725
  • General Chair:
  • Ting-Ao Tang
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Publication History

Published: 18 January 2005

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Cited By

View all
  • (2011)Optimal wafer cutting in shuttle layout problemsJournal of Combinatorial Optimization10.1007/s10878-009-9284-z22:2(202-216)Online publication date: 1-Aug-2011
  • (2009)BoxRouter 2.0ACM Transactions on Design Automation of Electronic Systems10.1145/1497561.149757514:2(1-21)Online publication date: 7-Apr-2009
  • (2008)Chip placement in a reticle for multiple-project wafer fabricationACM Transactions on Design Automation of Electronic Systems10.1145/1297666.129768813:1(1-21)Online publication date: 6-Feb-2008

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