Cited By
View all- Chung WYe YUy KYang H(2013)Magnetic biosensing system based on TSMC 0.35 um BioMEMS process for sensing magnetic nanobeadsMicro & Nano Letters10.1049/mnl.2013.00378:6(288-290)Online publication date: Jun-2013
From micro to nano: MEMS as an interface to the nano world
Pages 824 - 825
Abstract
Leveraging conventional microsystems technology, MEMS has become the technology of choice for a wide range of applications including inertial sensors for automotive, games, and consumer applications, projection displays or inkjet print heads. In support of recent efforts to shrink dimensions to the nanoscale, MEMS has established itself as a perfect technology for interaction with the nanoworld. We will describe initial results using MEMS to manipulate single molecules for medical diagnostics. This technology has the potential to turn complex laboratory procedures into procedures that are as simple as taking the temperature.
References
[1]
R. Edelstein et al., "The BARC biosensor applied o the detection of biological warefare agents," Biosens. Bioelectron., vol. 14, pp. 805--813.
[2]
M. A. M. Gijs, "Magnetic bead handling on-chip: new opportunities for analytical applications (review)," Microfluidics and Nanofluidics 1, 22--40 (2004).
[3]
T. Aytur, P. Beatty, B. Boser, M. Anwar, and T. Ishikawa, "An immunoassay platform based on CMOS Hall sensors," in Proceedings Solid-State and Actuator Workshop, Hilton Head Island, SC, June 2002, pp. 126--129.
[4]
T. Aytur, J. Foley, M. Anwar, B. Boser, E. Harris, P. Beatty, "A novel magnetic bead bioassay platform using a microchip-based sensor for infectious disease diagnosis," Journal of Immunological Methods, 2006, in press.
Index Terms
- From micro to nano: MEMS as an interface to the nano world
Recommendations
Micro/nano-heater integrated cantilevers for micro/nano-lithography applications
This paper describes an array of micro/nano-heater-integrated cantilevers for micro- and nano-lithography applications. In the scanning thermal cantilever, as the electrical current flows through the cantilever with a conductive tip, electrical power is ...
Fabrication of PDMS micro/nano hybrid surface for increasing hydrophobicity
In this paper, we present a simple and low-cost fabrication method of PDMS (polydimethylsiloxane) micro/nano hybrid surfaces for the purpose of increasing hydrophobicity of a solid surface based on the PDMS replica molding using a photolithographically ...
Nano-fabrication of condenser and micro-zone plates for compact X-ray microscopy
Proceedings of the 29th international conference on micro and nano engineeringWe demonstrate nano-fabrication of high-aspect ratio and high-spatial frequency diffractive X-ray optics with high uniformity for use in a laser-plasma-based compact water-window X-ray microscope. The structures are fabricated on 50 nm thin Si<inf>3</...
Comments
Information & Contributors
Information
Published In
Copyright © 2006 ACM.
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]
Sponsors
- SIGDA: ACM Special Interest Group on Design Automation
- IEEE-CAS: Circuits & Systems
- IEEE-CS: Computer Society
Publisher
Association for Computing Machinery
New York, NY, United States
Publication History
Published: 05 November 2006
Check for updates
Qualifiers
- Article
Conference
ICCAD06
Sponsor:
- SIGDA
- IEEE-CAS
- IEEE-CS
ICCAD06: The International Conference on Computer-Aided Design 2006
November 5 - 9, 2006
California, San Jose
Acceptance Rates
Overall Acceptance Rate 457 of 1,762 submissions, 26%
Contributors
Other Metrics
Bibliometrics & Citations
Bibliometrics
Article Metrics
- View Citations1Total Citations
- 259Total Downloads
- Downloads (Last 12 months)0
- Downloads (Last 6 weeks)0
Reflects downloads up to 07 Mar 2025
Other Metrics
Citations
Cited By
View all- Chung WYe YUy KYang H(2013)Magnetic biosensing system based on TSMC 0.35 um BioMEMS process for sensing magnetic nanobeadsMicro & Nano Letters10.1049/mnl.2013.00378:6(288-290)Online publication date: Jun-2013
View Options
Login options
Check if you have access through your login credentials or your institution to get full access on this article.
Sign in