ABSTRACT
This paper presents an application based on a hot wire anemometric sensor in MEMS technology in the field of water flow monitoring. New generations of MEMS sensors feature remarkable savings in area, costs and power respect to conventional discrete devices, but as drawback, they require complex electronic interfaces for signal conditioning to achieve high performances and a high reliability. This anemometric sensor implementation has been developed with ISIF, a Platform SoC, aiming to fast prototype a wide range of sensors thanks to its high configurable resources.
The presented system achieves good performances with respect to commercial devices, featuring resolution of ±0.35% up to ±1.76% with repeatability roughly ±1% respect to the full scale (0--250 cm/s). Furthermore the proposed system, thanks to the compact size of the sensor, its robustness and its low costs can represent a solution for diffusive monitoring in water distribution networks.
- B. W. van Oudheusden.; "Silicon flow sensors" Proceedings of IEEE, Volume: 135, Pt. D. No. 5 Sept. 1988.Google Scholar
- A Rasmussen, ME Zaghloul, "In the flow with MEMS", circuits and Devices Magazine, IEEE, 1998Google Scholar
- Ashauer, M. Glosch, H. Hedrich, F. Hey, N. Sandmaier, H. Lang, W. "Thermal flow sensor for liquids and gases", Micro Electro Mechanical Systems, 1998. Proceedings.Google Scholar
- M Elwenspoek "Thermal flow micro sensor" Semiconductor Conference, 1999. CAS '99 ProceedingsGoogle Scholar
- Robert D. McMillan, Jr, "Turbine wheel flow measuring transducer". Patent number: 4467660, Aug 28, 1984Google Scholar
- Nihat Okulan, H. Thurman Henderson, and Chong H. Ahn, "A Pulsed Mode Micromachined Flow Sensor with Temperature Drift Compensation" IEEE Transaction On Electron Devices, VOL. 47, No. 2, Febuary 2000Google Scholar
- Jack Chen, Jonathan Engel, Max Chang, and Chang Liu "3D Out-of-Plane Flow Sensor Array with Integrated Circuits", Proceedings of the 18th European Conference on Solid-State, 2004.Google Scholar
- F. D'Ascoli, M. Tonarelli, M. Melani, M. De Marinis, a. Giambastiani, L. Fanucci, "Intelligent sensor interface for automotive applications" ICECS2005 Gammarth Tunisia.Google Scholar
- F. Iozzi, F. D'Ascoli, M. Melani F. D'Ascoli, M. De Marinis, A. Giambastiani, A. Rocchi, L. Fanucci, "Low-g Accelerometer Fast Prototyping for Automotive Applications" DATE 2007, Nice. Google ScholarDigital Library
- Fraunhofer ISIT Achievements and Results - Annual Report 2006, page 33.Google Scholar
Index Terms
- Hot wire anemometric MEMS sensor for water flow monitoring
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