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Precise and flexible modeling for semiconductor wafer fabrication

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Published:01 December 1993Publication History
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References

  1. 1.D.}. Miller, Simulation of a semiconductor manufacturing line, Communications of the ACM, Vol. 33, No. 10, Oct. 1990, pp. 99-108. Google ScholarGoogle ScholarDigital LibraryDigital Library
  2. 2.B. Tullis et al., Successful modeling of a semiconductor R&D facility, ISMSS '90 Proc.Google ScholarGoogle Scholar
  3. 3.M. Enomoto et al., Line productivity improvement using simulation system for VLSI manufacturing, ECS Proc., pp. 603, 1991.Google ScholarGoogle Scholar
  4. 4.K.A. Pitts, Discrete-event simulation of wafer fabrication facility, Proc. of WSC, pp. 712, 1988. Google ScholarGoogle ScholarDigital LibraryDigital Library

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  • Published in

    cover image ACM Conferences
    WSC '93: Proceedings of the 25th conference on Winter simulation
    December 1993
    1429 pages
    ISBN:078031381X
    DOI:10.1145/256563

    Copyright © 1993 ACM

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    Association for Computing Machinery

    New York, NY, United States

    Publication History

    • Published: 1 December 1993

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