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3D VLSI: A Scalable Integration Beyond 2D

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Published:29 March 2015Publication History

ABSTRACT

As the semiconductor industry faces serious challenges extending the CMOS roadmap, traditional cost reduction benefits that accompanied power/performance/area (PPA) advantages of successive technology nodes have decreased due to a myriad of process integration challenges and increased variability, reliability, power and thermal constraints. 3D integration technologies have been pursued as a potential solution to help integrate more functions within a confined available dimensions of advanced mobile devices. 3D VLSI (3DV) is an emerging 3D integration technology that unlike packaging-driven 3D technologies (e.g., 2.5D, TSV-based 3D, etc.) can deliver orders of magnitude more integration densities due to extremely small sizes of vertical vias. In this paper, we describe the 3DV technology and its current benefits and challenges. We also survey recent literature that show the potential of 3DV to help continue Moore's law trajectory beyond 2D.

References

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  1. 3D VLSI: A Scalable Integration Beyond 2D

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    • Published in

      cover image ACM Conferences
      ISPD '15: Proceedings of the 2015 Symposium on International Symposium on Physical Design
      March 2015
      204 pages
      ISBN:9781450333993
      DOI:10.1145/2717764

      Copyright © 2015 ACM

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      Association for Computing Machinery

      New York, NY, United States

      Publication History

      • Published: 29 March 2015

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      ISPD '15 Paper Acceptance Rate14of37submissions,38%Overall Acceptance Rate62of172submissions,36%

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