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View all- Liu ZLiu YYang YLi J(2023)Template Design for Complex Block Copolymer Patterns Using a Machine Learning MethodACS Applied Materials & Interfaces10.1021/acsami.3c0501815:25(31049-31056)Online publication date: 19-Jun-2023
- Li XChen JZhu W(2018)Discrete relaxation method for contact layer decomposition of DSA with triple patterningIntegration10.1016/j.vlsi.2017.11.00461(77-87)Online publication date: Mar-2018