Index Terms
- The increasing demands of micro support
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Fabrication of PDMS micro/nano hybrid surface for increasing hydrophobicity
In this paper, we present a simple and low-cost fabrication method of PDMS (polydimethylsiloxane) micro/nano hybrid surfaces for the purpose of increasing hydrophobicity of a solid surface based on the PDMS replica molding using a photolithographically ...
The effect of increasing interfacial strength in micro fluidic system for heat detection with micro-sandglass shaped interlocks
We present a useful method to increase interfacial strength for micro fluidic system of calorimetry biosensor. The micro-sandglass shaped posts were fabricated by deep silicon reactive ion etching and Tetramethyl ammonium hydroxide (25 wt% TMAH) ...
Micro molding for double-sided micro structuring of SU-8 resist
Advances in micro and nano fabrication technologies for MEMS require high-level measurement techniques with regard to sampling and sensitivity. For this purpose at the Institute of Microtechnology (IMT) highly sensitive piezoresistive 3D force sensors ...
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